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File:Beispiele für Fraunhofer IPMS Mikroscanner.jpg

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Deutsch: Beispiele für Fraunhofer IPMS Mikroscanner.

a) Resonanter Translationsspiegel im Pantographen-Design mit ±500 µm Auslenkung. b) LinScan-Mikroscanner in einem DIL20-Gehäuse. Elektrostatischer 2D-Mikroscanner mit einer quasistatisch betriebenen Antriebsachse von bis zu ±8° statischer Auslenkung @ 120 V

und einer resonant angetriebenen Achse mit einer nominalen Amplitude von ±9.5° @ 23.5 kHz & 160 V.
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Author Positiveimpact
Other versions Derivative works of this file:  Fraunhofer IPMS 2D-Mikroscanner-Modul.jpg

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